검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges Kim SS, Chung CW, Chang HY Thin Solid Films, 435(1-2), 72, 2003 |
| No. | Article |
|---|---|
| 1 |
Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges Kim SS, Chung CW, Chang HY Thin Solid Films, 435(1-2), 72, 2003 |