검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning Yi H, Bao XY, Zhang J, Bencher C, Chang LW, Chen XY, Tiberio R, Conway J, Dai HX, Chen YM, Mitra S, Wong HSP Advanced Materials, 24(23), 3107, 2012 |
| 2 |
Fullerene-incorporation for enhancing the electron beam resist performance for contact hole patterning and filling You HC, Ko FH, Lei TF Thin Solid Films, 500(1-2), 214, 2006 |