검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Design specific variation in via/contact pattern transfer: Full chip analysis Choy JH, Sukharev V, Markosian A, Kteyan A, Granik Y, Bliznetsov V Journal of Vacuum Science & Technology B, 27(6), 2962, 2009 |
| No. | Article |
|---|---|
| 1 |
Design specific variation in via/contact pattern transfer: Full chip analysis Choy JH, Sukharev V, Markosian A, Kteyan A, Granik Y, Bliznetsov V Journal of Vacuum Science & Technology B, 27(6), 2962, 2009 |