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| No. | Article |
|---|---|
| 1 |
Homogeneity of nitrogen and phosphorus co-implants in 4H-SiC: Full wafer scale investigation Blanque S, Lyonnet J, Camassel J, Perez R, Terziyska P, Contreras S, Godignon P, Mestres N, Pascual J Materials Science Forum, 483, 645, 2005 |