검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Impact of nitrogen and/or fluorine implantation on deep-submicron Co-salicide process Chang TY, Lei TF, Chao TS, Chen SW, Kao LM, Chen SK, Tuan A, Su TP Solid-State Electronics, 46(8), 1097, 2002 |
| No. | Article |
|---|---|
| 1 |
Impact of nitrogen and/or fluorine implantation on deep-submicron Co-salicide process Chang TY, Lei TF, Chao TS, Chen SW, Kao LM, Chen SK, Tuan A, Su TP Solid-State Electronics, 46(8), 1097, 2002 |