검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigation of residual impurities in 4H-SiC epitaxial layers grown by hot-wall chemical vapor deposition Nishio J, Kushibe M, Masahara K, Kojima K, Ohno T, Ishida Y, Takahashi T, Suzuki T, Tanaka T, Yoshida S, Arai K Materials Science Forum, 389-3, 215, 2002 |