검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electron temperature and ion energy control in modified magnetron-typed RF discharge Shimizu T, Kato K, Li Y, Iizuka S, Sato N Thin Solid Films, 386(2), 248, 2001 |
| No. | Article |
|---|---|
| 1 |
Electron temperature and ion energy control in modified magnetron-typed RF discharge Shimizu T, Kato K, Li Y, Iizuka S, Sato N Thin Solid Films, 386(2), 248, 2001 |