검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deposition of SiC filmsby ion-enhanced plasma chemical vapor deposition using tetramethylsilane plus H-2 Yoshino M, Shimozuma M, Date H, Itoh H, Tagashira H Thin Solid Films, 492(1-2), 207, 2005 |
| No. | Article |
|---|---|
| 1 |
Deposition of SiC filmsby ion-enhanced plasma chemical vapor deposition using tetramethylsilane plus H-2 Yoshino M, Shimozuma M, Date H, Itoh H, Tagashira H Thin Solid Films, 492(1-2), 207, 2005 |