검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Studies on reactive sputtering process of TiN films using small mass analyzers Banno T, Michizono S, Saito Y Applied Surface Science, 169, 757, 2001 |
| No. | Article |
|---|---|
| 1 |
Studies on reactive sputtering process of TiN films using small mass analyzers Banno T, Michizono S, Saito Y Applied Surface Science, 169, 757, 2001 |