검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition and characterization of stoichiometric erbium oxide thin dielectrics on Si(100) using (CpMe)(3)Er precursor and ozone Xu RS, Tao Q, Yang Y, Takoudis CG Applied Surface Science, 258(22), 8514, 2012 |
| 2 |
UV assisted low temperature nitridation and post deposition oxidation technique for hafnium oxide gate dielectric Son SY, Jang JH, Kumar P, Ramani K, Craciun V, Singh RK Applied Surface Science, 254(21), 7087, 2008 |
| 3 |
Pulsed laser deposition of oxide gate dielectrics for pentacene organic field-effect transistors Yaginuma S, Yamaguchi J, Itaka K, Koinuma H Thin Solid Films, 486(1-2), 218, 2005 |
| 4 |
Effects of O-2/N2O-plasma treatment on nitride films on strained Si Bera LK, Senapati B, Maikap S, Maiti CK Solid-State Electronics, 44(9), 1533, 2000 |