화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Study of plasma charging-induced white pixel defect increase in CMOS active pixel sensor
Tokashiki K, Bai K, Baek K, Kim Y, Min G, Kang C, Cho H, Moon J
Thin Solid Films, 515(12), 4864, 2007
2 Threshold voltage shift of submicron p-channel MOSFET due to Si surface damage from plasma etching process
Kim GH, Kang YR, Kim WJ, Kim SY, Kim CI
Thin Solid Films, 515(12), 4892, 2007
3 Dependence of the performance and reliability of n-metal-oxide-silicon field effect transistors on interlayer dielectric processing
Trabzon L, Awadelkarim OO, Werking J
Journal of Vacuum Science & Technology B, 17(5), 2216, 1999