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용융코팅법에 의한 내플라즈마성 Y2O3-Al2O3-SiO2계 코팅 세라믹스 제조 박의근, 이현권 Korean Journal of Materials Research, 30(7), 359, 2020 |
2 |
YAG 상함량에 따른 YAS (Y2O3-Al2O3-SiO2)계 코팅층의 내플라즈마 특성 박의근, 이현권 Korean Journal of Materials Research, 30(11), 621, 2020 |
3 |
The effect of composition of plasma resistance of CaO-Al2O3-SiO2 glasses under Fluorocarbon Plasma with Ar+ Na H, Park J, Choi SC, Kim HJ Applied Surface Science, 476, 663, 2019 |
4 |
Plasma resistance of transparent Y2O3 ceramics prepared by slip casting: A comparison with translucent Al2O3 Liu W, Jin LL, Wang SW Materials Chemistry and Physics, 232, 471, 2019 |
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Evaluation method of characteristics of Al2O3 coating materials Roh SW, Kang SW, Kim JT, Shin JS, Moonb DK, Son TI, Yun JY Journal of Industrial and Engineering Chemistry, 17(3), 498, 2011 |
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NF3와 O2 리모트 플라즈마 노출에 따른 니트릴 가교 과불소고무와 과산화물 가교 과불소고무의 무게 손실과 모폴로지 특성 이경원, 김태호 Polymer(Korea), 35(2), 136, 2011 |
7 |
Effect of electrostatic waves on a rf field penetration into highly collisional helicon plasmas Shinohara S, Shamrai KP Thin Solid Films, 407(1-2), 215, 2002 |