검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled CF4 plasmas Ventzek PLG, Denpoh K Journal of Vacuum Science & Technology A, 27(2), 287, 2009 |
| 2 |
Establishment of very uniform gas-flow pattern in the process chamber for microwave-excited high-density plasma by ceramic shower plate Goto T, Inokuchi A, Ishibashi K, Yasuda S, Nakanishi T, Kohno M, Okesaku M, Sasaki M, Nozawa T, Hirayama M, Ohmi T Journal of Vacuum Science & Technology A, 27(4), 686, 2009 |
| 3 |
An alternative quantitative analysis of non-equilibrium transport coefficients in argon plasmas Burm KTAL, Goedheer WJ, Schram DC Plasma Chemistry and Plasma Processing, 22(3), 413, 2002 |
| 4 |
Two-temperature transport coefficients in argon-hydrogen plasmas - I: Elastic processes and collision integrals Rat V, Andre P, Aubreton J, Elchinger MF, Fauchais P, Lefort A Plasma Chemistry and Plasma Processing, 22(4), 453, 2002 |
| 5 |
Two-temperature transport coefficients in argon-hydrogen plasmas - II: Inelastic processes and influence of composition Rat V, Andre P, Aubreton J, Elchinger MF, Fauchais P, Lefort A Plasma Chemistry and Plasma Processing, 22(4), 475, 2002 |
| 6 |
Electron velocity distribution functions in a sputtering magnetron discharge for the ExB direction Sheridan TE, Goeckner MJ, Goree J Journal of Vacuum Science & Technology A, 16(4), 2173, 1998 |
| 7 |
In-situ analysis of particle contamination in magnetron sputtering processes Selwyn GS, Weiss CA, Sequeda F, Huang C Thin Solid Films, 317(1-2), 85, 1998 |
| 8 |
Fluorescent Hydroxyl Emissions from Saturns Ring Atmosphere Hall DT, Feldman PD, Holberg JB, Mcgrath MA Science, 272(5261), 516, 1996 |
| 9 |
Interpretation of Transient Ultrafiltration and Microfiltration of Blood and Protein Solutions Jaffrin MY, Ding LH, Defossez M, Laurent JM Chemical Engineering Science, 50(6), 907, 1995 |
| 10 |
Unstable Arc Operation and Cathode Spot Motion in a Magnetically Filtered Vacuum-Arc Deposition System Zhitomirsky VN, Boxman RL, Goldsmith S Journal of Vacuum Science & Technology A, 13(4), 2233, 1995 |