검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Amorphous and excimer laser annealed SiC films for TFT fabrication Garcia B, Estrada M, Albertin KF, Carreno MNP, Pereyra I, Resendiz L Solid-State Electronics, 50(2), 241, 2006 |
| 2 |
Characterization of polycrystalline SiC layers grown by ECR-PECVD for micro-electro-mechanical systems Ricciardi C, Bennici E, Cocuzza M, Mandracci R, Bich D, Guglielmetti V, Barucca G Thin Solid Films, 427(1-2), 187, 2003 |
| 3 |
Characterization of polycrystalline SiC grown on SiO2 and Si3N4 by APCVD for MEMS applications Wu CH, Zorman CA, Mehregany M Materials Science Forum, 338-3, 541, 2000 |
| 4 |
Molding-based thin film patterning techniques for SiC surface micromachining Song X, Guo S, Zorman CA, Wu CH, Yasseen AA, Mehregany M Materials Science Forum, 338-3, 1141, 2000 |