검색결과 : 1건
No. | Article |
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1 |
Growth of SiC films using tetraethylsilane Kubo N, Kawase T, Asahina S, Kanayama N, Tsuda H, Moritani A, Kitahara K Materials Science Forum, 457-460, 269, 2004 |
No. | Article |
---|---|
1 |
Growth of SiC films using tetraethylsilane Kubo N, Kawase T, Asahina S, Kanayama N, Tsuda H, Moritani A, Kitahara K Materials Science Forum, 457-460, 269, 2004 |