검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Simulation of growth rate and deposition profile on the periodically patterned substrate Baek BJ, Kang SJ, Kim JT, Pak B, Lee CR Journal of Crystal Growth, 304(1), 211, 2007 |
| 2 |
Topography simulation for the virtual wafer fab Cale TS, Merchant TP, Borucki LJ, Labun AH Thin Solid Films, 365(2), 152, 2000 |