화학공학소재연구정보센터
Thin Solid Films, Vol.517, No.23, 6345-6348, 2009
Surface-induced time-dependent instability of ZnO based thin-film transistors
We report on the surface-induced time-dependent instability of ZnO based thin-film transistors (ZnO-TFTs) with interdigitated source/drain (S/D) electrodes. As time elapsed, a considerable shift of threshold voltage (V(T)) was observed (by similar to-16V) from our TFT. Contact angle of de-ionized water on ZnO surface also changed from 30 degrees to 110 degrees, revealing time-dependent surface state change. According to X-ray photoemission spectroscopy (XPS) measurements, the Zn 2p(3/2) core-level peak and the valence band maximum (VBM) of aged ZnO surface shifted to the higher binding energy by 0.3 eV, which implies a downward energy band bending of the ZnO back channel-surface. We conclude that without passivation layer any bottom gate ZnO-TFT meets the surface-induced electrical instabilities due to the time-dependent conductance of ZnO surface. (C) 2009 Elsevier B.V. All rights reserved.