We have studied the kinetic processes of the epitaxial growth for CoPt alloy films using the master equation method. The kinetic phase diagrams of CoPt alloy films which show the phase formation conditions during the epitaxial growth are determined. From the kinetic phase diagrams, we find that the [001] ordered structure is much easy to be grown at high temperature while the [100] ordered structure is easy to be grown at low temperature although both the [001] and [100] ordering could be the equilibrium ground states. The atomic deposition, ordering and surface segregation lead to a rich variety of phases in epitaxial growth. The surface segregation is found to enhance the [001] ordering and leads to the formation of the [001] ordered phase at high temperature. (C) 2010 Elsevier B.V. All rights reserved.