화학공학소재연구정보센터
Thin Solid Films, Vol.518, No.17, 4868-4873, 2010
Competitive effects of film thickness and growth rate in spray pyrolytically deposited fluorine-doped tin dioxide films
Here we report efforts to understand the competitive roles of film thickness (up to similar to 650 nm) and growth rate (up to similar to 190 nm/min) in spray pyrolytically deposited fluorine-doped tin dioxide films. This was achieved by varying the time of deposition and/or the precursor concentration. Film properties were investigated using X-ray diffraction technique and Hall effect measurements. The thickness evolution involved textured growth along [200] orientation followed by a secondary prominence of [110] and [101] orientations. The growth rate induced effects accelerated this change. The carrier concentration and carrier mobility showed that the [200] oriented growth is technologically advantageous and can be obtained using a wider growth rate range similar to 50-130 nm/min. (C) 2010 Elsevier B.V. All rights reserved.