화학공학소재연구정보센터
Materials Science Forum, Vol.389-3, 463-466, 2002
RHEED: A tool for structural investigations of thin polytypic SiC layers
Using Kikuchi pattern obtained by RHEED the inner potential of (3 x 3)-Si reconstructed 6H-SiC was determined to be 15.4 V. Applying a semi-kinematical RHEED pattern simulation it was shown that in the case of two dimensional diffraction it is possible to determine the polarity and the polytype structure of silicon carbide.