화학공학소재연구정보센터
Materials Science Forum, Vol.389-3, 467-470, 2002
Electron-irradiation-induced amorphization of 6H-SiC by 300 keV transmission electron microscope equipped with a field-emission gun
Electron-irradiation induced amorphization in silicon carbide (SiC) has been investigated using transmission electron microscopy (TEM) equipped with a field-emission gun. Single crystals of 6H-SiC were irradiated with 300 keV electrons at room temperature. Electron diffraction and high-resolution TEM observations indicate that the electron-irradiated area is successfully amorphized. The present irradiation conditions are beyond those required to induce a crystal-to-amorphous phase transformation reported previously (the incident electron energy of >750 keV and the temperature of <290 K). This is attributed to the domination of damage-producing rate over the recovery rate in the electron-irradiated area due to the high electron flux associated with a field-emission gun used in this work.