Materials Science Forum, Vol.457-460, 1467-1470, 2004
Triangular pore formation in highly doped n-type 4H SIC
Our study of photoassisted electrochemical etching of highly doped n-type 4H SiC shows that the anodization proceeds anisotropically. As a result, a triangular-channel porous structure is formed independent of the direction of the external electric field applied to the sample. It is proposed that the observed pore morphology is due to differences in oxidation rates of the crystallographic planes terminated with silicon and carbon atoms.