This paper describes an experimental technique to identify robust nanoscale coatings for improving the long-term reliability of metallic microelectromechanical systems. More specifically, the influence of nanoscale alumina coatings on the fatigue crack initiation process in 20 mu m thick electrodeposited Ni films was investigated in a mild (30 degrees C, 50% RH) and harsh (80 degrees C, 90% RH) environment. Atomic-layer-deposited alumina layers, with thicknesses of 5 and 25 nm, were coated on Ni fatigue micro-resonators, and the fatigue degradation behavior in the very high cycle fatigue regime was compared to that of uncoated structures. Evidence based on post-test scanning electron microscopy and resonant frequency evolution plots shows that the coatings do not prevent the formation of fatigue extrusions and micro-cracks. However, their formation is likely delayed for the 25 nm thick alumina-coated Ni films. (c) 2012 Elsevier B.V. All rights reserved.