광촉매 TiO2 함유 ZrO2 박막의 초친수성

정기욱; 이태규; 문종수; Ki-Uk Jung; Tea-Gu Lee; Chong-Soo Mun

Korean Journal of Materials Research, Vol.18, No.4, 211-217, April, 2008

DOI10.3740/MRSK.2008.18.4.211 Export Citation

광촉매 TiO2 함유 ZrO2 박막의 초친수성

Super Hydrophilic Properties of ZrO2 Thin Film Containing TiO2 Photo-Catalysis

정기욱, 이태규¹, 문종수^{1, †}

경남대학교 대학원 재료공학과
¹경남대학교 신소재공학과

Ki-Uk Jung, Tea-Gu Lee¹, and Chong-Soo Mun^{1, †}

Dept. of Material Science and Engineering, Kyungnam University, Masan, Korea
¹Dept. of Advanced Materials Engineering, Kyungnam University, Masan, Korea

E-mail:

A ZrO2 coating solution containing TiO2 photo-catalysis, which is transparent in visible light, was prepared by the hydrolysis of alkoxide, and thin films on the SiO2 glass substrate were formed in a dipcoating method. These thin films were heat-treated at temperatures ranging from 250oC-800oC and their characteristics were subjected to thermal analysis, XRD, spectrometry, SEM, EDS, contact angle measurement, and AFM. Tetragonal ZrO2 phase was found in the thin film heat treated at 450oC, and anatase TiO2 phase was detected in the thin film heat-treated at 600oC and above. The thickness of the films was approximately 300 nm, and the roughness was 0.66 nm. Thus, the film properties are excellent. The films are super hydrophilic with a contact angle of 4.0o; moreover, they have self-cleaning effect due to the photo catalytic property of anatase TiO2.

Keywords:ZrO2 film;dip-coating;super hydrophilic;photo-catalysis;self-cleaning effect

[References]

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Huang W, Shi J, J. Sol-Gel Sci. Technol., 20, 145 (2001)
Stamper A, Greve DW, Wong D, Schlesinger TE, Appl. Phys. Lett., 41(20), 1746 (1998)
Kim KD, Shin DG, Cho YA, Jeon JS, Choi DS, Park JJ, Korean J. Mater. Res., 9(3), 234 (1999)
Kim KD, Cho YA, Shin DG, Jeon JS, Choi DS, Park JJ, Korean J. Mater. Res., 9(2), 155 (1999)
Austen DH, Gustafson TK, Kaplan AE, Kelly PL, Shen YR, Appl. Opt., 26, 211 (1987)
Peyghambarian N, Koch SW, Semiconductor Nonlinear Materials, in Nonlinear Photonics, eds. Gibbs HM et al., p. 7, Springer Verlag, Berlin (1990). (1990)
Matsuoka J, Naruse R, Nasu H, Kamiya K, J. Non-Cryst. Solids, 218, 151 (1997)
Kim KM, Park HS, Mun CS, J. Kor. Ceram. Soc., 30(11), 897 (1993)
Mun CS, Kang JB, Kim KM, J. Kor. Ceram. Soc., 33(12), 1353 (1996)
Mun CS, Jo BR, Kang BS, Korean J. Mater. Res., 12(8), 650 (2002)
Mun CS, Lee SM, Korean J. Mater. Res., 13(4), 219 (2003)
Mun CS, Lee SM, J. Kor. Ceram. Soc., 40(5), 475 (2003)
Izumi K, Murakami M, Deguchi T, Morita A, J. Am Ceram. Soc., 72, 1465 (1989)
Hirano S, Kato K, Adv. Ceram. Mater., 3(5), 503 (1988)
Murakata T, Sato S, J. Mater. Sci., 27, 1567 (1992)
Sakurai C, Fukui T, J. Am. Ceram. Soc., 76(4), 1061 (1993)
Takahashi M, Kume M, J. Mater. Sci., 24, 243 (1989)
Yoko T, Kamiya K, Yuasa A, Tanaka K, Sakka S, J. Non-Cryst. Solids, 100, 483 (1989)
Lee K, Lee NH, Shin SH, Lee HG, Kim SJ, Korean J. Mater. Res., (in Korean), 14(9), 634 (2004)
Kim DS, Park DH, Kim GD, Choi SY, Metals. Mater. International., 10(4), 361 (2004)
Yoo HK, Lee JK, Hwang KH, Seo DS, Kang HS, Bae HS, Kim WW, J. Kor. Ceram. Soc., (in Korean), 39(6), 535 (2002)
Jung MY, Lee ZY, Son HJ, J. Kor. Ceram. Soc., (in Korean), 39(6), 252 (2002)
Kim SJ, Lee NH, Lee K, Choi CJ, J. Kor. Ceram. Soc., (in Korean), 42(7), 461 (2005)
Han JK, Saito F, Park JG, Lee BT, J. Kor. Ceram. Soc., (in Korean), 42(1), 7 (2005)
Yeh YC, Tseng TY, Chang DA, J. Am. Ceram. Soc., 72, 1472 (1989)
Park SI, Lee DY, Lee MH, Lee SJ, Kim BY, J. Kor, Ceram. Soc., (in Korean), 42(8), 548 (2005)
Brinker CJ, Scherer GW, Sol-Gel Science, wiley, New York, Chapter 13 (1990). (1990)
Arfsten NJ, J. Non-Cryst. Solids, 63, 243 (1984)
Han YS, Park JK, J. Kor. Ceram. Soc., (in Korean), 41(7), 548 (2004)
Brinker CJ, Scherer GW, Sol-Gel science, Wiley, New York (1990). (1990)
Meyerhofer D, J. Appl. Phys., 49, 3993 (1978)
Vorotilov K, Petrovsky V, Vasiljev V, J. Sol-Gel Sci., 5, 173 (1995)
Strawbridge I, James PF, J. Non-Cryst. Solids, 82, 366 (1986)
Dislich H, Thin Solid Films, 90, 295 (1982)
Yoko T, Surface, ( in Japan), 24(3), 131 (1986)
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Scriren LE, Better Ceram. Through Chem., 717 (1988)
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[Referenced By]

[1] Bae SY, Choi HS, Choi SY, Oh YJ, Ceram. International, 26, 213 (2000)

[2] Huang W, Shi J, J. Sol-Gel Sci. Technol., 20, 145 (2001)

[3] Stamper A, Greve DW, Wong D, Schlesinger TE, Appl. Phys. Lett., 41(20), 1746 (1998)

[4] Kim KD, Shin DG, Cho YA, Jeon JS, Choi DS, Park JJ, Korean J. Mater. Res., 9(3), 234 (1999)

[5] Kim KD, Cho YA, Shin DG, Jeon JS, Choi DS, Park JJ, Korean J. Mater. Res., 9(2), 155 (1999)

[6] Austen DH, Gustafson TK, Kaplan AE, Kelly PL, Shen YR, Appl. Opt., 26, 211 (1987)

[7] Peyghambarian N, Koch SW, Semiconductor Nonlinear Materials, in Nonlinear Photonics, eds. Gibbs HM et al., p. 7, Springer Verlag, Berlin (1990). (1990)

[8] Matsuoka J, Naruse R, Nasu H, Kamiya K, J. Non-Cryst. Solids, 218, 151 (1997)

[9] Kim KM, Park HS, Mun CS, J. Kor. Ceram. Soc., 30(11), 897 (1993)

[10] Mun CS, Kang JB, Kim KM, J. Kor. Ceram. Soc., 33(12), 1353 (1996)

[11] Mun CS, Jo BR, Kang BS, Korean J. Mater. Res., 12(8), 650 (2002)

[12] Mun CS, Lee SM, Korean J. Mater. Res., 13(4), 219 (2003)

[13] Mun CS, Lee SM, J. Kor. Ceram. Soc., 40(5), 475 (2003)

[14] Izumi K, Murakami M, Deguchi T, Morita A, J. Am Ceram. Soc., 72, 1465 (1989)

[15] Hirano S, Kato K, Adv. Ceram. Mater., 3(5), 503 (1988)

[16] Murakata T, Sato S, J. Mater. Sci., 27, 1567 (1992)

[17] Sakurai C, Fukui T, J. Am. Ceram. Soc., 76(4), 1061 (1993)

[18] Takahashi M, Kume M, J. Mater. Sci., 24, 243 (1989)

[19] Yoko T, Kamiya K, Yuasa A, Tanaka K, Sakka S, J. Non-Cryst. Solids, 100, 483 (1989)

[20] Lee K, Lee NH, Shin SH, Lee HG, Kim SJ, Korean J. Mater. Res., (in Korean), 14(9), 634 (2004)

[21] Kim DS, Park DH, Kim GD, Choi SY, Metals. Mater. International., 10(4), 361 (2004)

[22] Yoo HK, Lee JK, Hwang KH, Seo DS, Kang HS, Bae HS, Kim WW, J. Kor. Ceram. Soc., (in Korean), 39(6), 535 (2002)

[23] Jung MY, Lee ZY, Son HJ, J. Kor. Ceram. Soc., (in Korean), 39(6), 252 (2002)

[24] Kim SJ, Lee NH, Lee K, Choi CJ, J. Kor. Ceram. Soc., (in Korean), 42(7), 461 (2005)

[25] Han JK, Saito F, Park JG, Lee BT, J. Kor. Ceram. Soc., (in Korean), 42(1), 7 (2005)

[26] Yeh YC, Tseng TY, Chang DA, J. Am. Ceram. Soc., 72, 1472 (1989)

[27] Park SI, Lee DY, Lee MH, Lee SJ, Kim BY, J. Kor, Ceram. Soc., (in Korean), 42(8), 548 (2005)

[28] Brinker CJ, Scherer GW, Sol-Gel Science, wiley, New York, Chapter 13 (1990). (1990)

[29] Arfsten NJ, J. Non-Cryst. Solids, 63, 243 (1984)

[30] Han YS, Park JK, J. Kor. Ceram. Soc., (in Korean), 41(7), 548 (2004)

[31] Brinker CJ, Scherer GW, Sol-Gel science, Wiley, New York (1990). (1990)

[32] Meyerhofer D, J. Appl. Phys., 49, 3993 (1978)

[33] Vorotilov K, Petrovsky V, Vasiljev V, J. Sol-Gel Sci., 5, 173 (1995)

[34] Strawbridge I, James PF, J. Non-Cryst. Solids, 82, 366 (1986)

[35] Dislich H, Thin Solid Films, 90, 295 (1982)

[36] Yoko T, Surface, ( in Japan), 24(3), 131 (1986)

[37] Yoko T, Sakka S, Manual of Optical Thin Film Technology (in Japan), Tokyo, Optronics Co., 113 (1989). (1989)

[38] Scriren LE, Better Ceram. Through Chem., 717 (1988)

[39] Kim BH, Hong K, Cho HY, J. Kor. Ceram. Soc., (in Korea), 31(7), 804 (1994)

[40] Mun CS, Science of Sol-Gel, Kyungnam University Press (in Korean), 109 (1998). (1998)

[41] Atta A, Biswas PK, Ganguli D, Thin Solid Films, 197, 187 (1991)