진공 웹코터로 제작된 대면적 ITO/PET의 특성 연구

김지환; 박동희; 김종빈; 변동진; 최원국; Ji-Hwan Kim; Dong-Hee Park; Jong-Bin Kim; Dong-Jin Byun; Won-Kook Choi

Korean Journal of Materials Research, Vol.17, No.10, 516-520, October, 2007

DOI10.3740/MRSK.2007.17.10.516 Export Citation

진공 웹코터로 제작된 대면적 ITO/PET의 특성 연구

Characteristics of Large Area ITO/PET Fabricated by Vacuum Web Coater

김지환, 박동희¹, 김종빈, 변동진 , 최원국^{1, †}

고려대학교 재료공학과
¹한국과학기술연구원 재료기술연구본부

Ji-Hwan Kim, Dong-Hee Park, Jong-Bin Kim¹, Dong-Jin Byun¹, and Won-Kook Choi^†

Materials Science and Technologh Research Division, Korea Institute of Science and Technology, Korea
¹Department of Materials Science and Engineering, Korea University, Korea

E-mail:

Indium tin oxide, which is used as transparent conducting layer in flexible device, is deposited on PET film by a magnetron sputtering in 300 mm wide roll-to-roll process (vacuum web coating). Sheet resistance, specific resistance and transmittance is differed by sputtering parameters such as working pressures, oxygen partial pressure, and thickness of ITO layer. ITO layer is deposited about 90 nm at roll speed of 0.24 m/min and its sputtering power is 3 kW. From the XRD spectrum deposited ITO layer is verified as amorphous. Under working pressure varied from to , sheet resistance is lowest at the working pressure of and its value is from to at the thickness of 90 nm. Oxygen partial pressure also varies sheet resistance and is optimized at the regime from 0.2% () to 0.6% (). In this oxygen partial pressure sheet resistance is lower than . As ITO layer thickness increases, sheet resistance decreases down to and specific resistance is about in 340 nm thickness ITO layer. Transmittance is measured at the wavelength of 550 nm and is about 90% for 180 nm thickness ITO/PET.

Keywords:Vacuum web coating;ITO/PET;Magnetron sputtering;Transmittance;Resisitivity

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Minami T, Sonohara H, Kakumu T, Takata S, Thin Solid Films, 270(1-2), 37 (1995)
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Kenko H, Miyake K, J. Appl. Phys., 53(36), 29 (1982)
Song WC, J. Kor. Inst. Elect. Eelectron. Mater. Engin., 17, 12 (2004)

[Related Articles]

[1] Ludwig R, Kukla R, Josephson E, Proceedings of the IEEE, 93, 8 (2005)

[2] Arnold DG, Flexible Display and Electronics 2004, J. Olmstead, Intertech, Portland, (2004) (2004)

[3] Doda A, Materials Today, 9, 24 (2006)

[4] Crawford GP, Flexible Flat Panel Displays, Crawford GP, John Wily & Sons, New York, (2005) (2005)

[5] Shigesato Y, Takaki S, Haranoh T, J. Appl. Phys., 71, 3356 (1992)

[6] Kubota E, Shigesato Y, Igarashi M, Haranoh T, Suzuki K, Jpn. J. Appl. Phys., 33, 4997 (1994)

[7] Zheng ZP, Kwok HS, Appl. Phys. Lett., 63, 1 (1993)

[8] Izumi H, Adurodija F, Kaneyoshi T, Ishihara T, Yoshika H, Motoyama M, J. Appl. Phys., 91, 1213 (2002)

[9] Kim H, Horwitz JS, Krushto GP, Kafafi ZH, Chrisey DB, Appl. Phys. Lett., 79, 284 (2001)

[10] Ma J, Li SY, Zhao JQ, Ma HL, Thin Solid Films, 307(1-2), 200 (1997)

[11] Kim HH, Cho MJ, Park WJ, Lee JG, Lim KJ, Trans. EEM., 3(2), 6 (2002)

[12] Keum MJ, Kim KH, J. Kor. Inst. Elect. Eelectron. Mater. Engin., 19(1), 87 (2006)

[13] Choi HW, Park DH, Kim JH, CHoi WK, Sohn YJ, Song BS, Cho J, Kim YS, J. Kor. Vac. Soc., 16(2), 79 (2007)

[14] Minami T, Sonohara H, Kakumu T, Takata S, Thin Solid Films, 270(1-2), 37 (1995)

[15] Kulkarni AK, Lim T, Khan M, Schulz KH, J. Vac. Sci. Technol. A, 16(3), 1636 (1998)

[16] Higuchi Y, J. Surf. Finish. Soc. Jap., 43, 74 (1992)

[17] Boehme M, Charton C, Surface and Coatings Technology, 200, 932 (2005)

[18] Kenko H, Miyake K, J. Appl. Phys., 53(36), 29 (1982)

[19] Song WC, J. Kor. Inst. Elect. Eelectron. Mater. Engin., 17, 12 (2004)