AlGaN/GaN dual metal Schottky barrier diodes (SBD) are demonstrated on a silicon substrate. The anode is composed of two metals with different work functions to achieve a better trade-off between the forward and the reverse characteristics. The low work function metal Ti reduces the turn-on voltage and the high work function metal Ni at the edge of the anode reduces the reverse leakage current and maintains the breakdown voltage. The turn-on voltage of the Ni-SBD is reduced from 1.47 V to 0.57 V by employing the dual metal anode, and the breakdown voltages are virtually unaffected. (C) 2014 Elsevier Ltd. All rights reserved.