화학공학소재연구정보센터
Molecular Crystals and Liquid Crystals, Vol.386, 81-87, 2002
Opto-electrical and structural properties of the diamond like carbon films deposited in argon gas ambient
We have studied the effects of ambient argon gas (Ar) pressure on the surface morphology, structural and physical properties of the carbon (C) films deposited by pulsed laser deposition (PLD) using a camphoric carbon (CC) soot target. The relation between the film properties and ambient inert gas pressure in the deposition is discussed. The optical gap and electrical resistivity are found to decrease at lower Ar pressure and increase with higher pressure. The surface morphology, structural and physical properties of deposited films were found to be strongly dependent on pressure of the ambient inert gas. Improvement of the opto-electrical and structural properties of the carbonaceous films deposited in Ar using CC target reveals different behaviour than reported earlier. a