화학공학소재연구정보센터
Journal of Crystal Growth, Vol.459, 118-123, 2017
A RHEED/MBE-STM investigation of the static and dynamic InAs(001) surface
We report here the temperature-dependent incorporation kinetics of dimeric arsenic in InAs(001) homoepitaxy, using reflection high-energy electron diffraction (RHEED). Surface reconstructions, in combination with the RHEED investigation have provided insight into the growth of InAs(001), developing an accurate method of controlling the V:III ratio, which has been utilised to probe the low temperature epitaxial growth of indium arsenide epitaxial layers.