AIP법으로 증착된 TiN/CrN 다층박막의 특성 분석

백민숙; 윤동주; 허기복; 김병일; Min-Sook Baek; Dong-Joo Yoon; Ki-Bok Heo; Byung-Il Kim

Korean Journal of Materials Research, Vol.28, No.7, 405-410, July, 2018

DOI10.3740/MRSK.2018.28.7.405 Export Citation

AIP법으로 증착된 TiN/CrN 다층박막의 특성 분석

Analysis of Properties Multi-Layered TiN/CrN Thin Films Deposited by AIP Method

백민숙, 윤동주^†, 허기복¹, 김병일²

순천대학교 차세대전략산업용희유자원실용화센터
¹㈜삼우ECO
²순천대학교 신소재공학과

Min-Sook Baek, Dong-Joo Yoon^†, Ki-Bok Heo¹, and Byung-Il Kim²

Center for practical Use of Rare Materials, Sunchon National University, Suncheon 57922, Republic of Korea
¹SAMWOO ECO., Ltd, Gwangyang 57759, Republic of Korea
²Department of New Materials Engineering, Sunchon National University, Suncheon 57922, Republic of Korea

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TiN and CrN thin films are among the most used coatings in machine and tool steels. TiN and CrN are deposited by arc ion plating(AIP) method. The AIP method inhibits the reaction by depositing a hard, protective coating on the material surface. In this study, the characteristics of multi-layer(TiN/CrN/TiN(TCT), CrN/TiN/CrN(CTC)) are investigated. For comparison, TiN with the same thickness as the multilayer is formed as a single layer and analyzed. Thin films formed as multilayers are well stacked. The characteristics of micro hardness and corrosion resistance are better than those of single layer TiN. The TiN/CrN peak is confirmed because both TCT and CTC are formed of the same component(TiN, CrN), and the phase is first grown in the (111) direction, which is the growth direction. However, the adhesion and abrasion resistance of the multilayer films are somewhat lower.

Keywords:AIP method;TiN;CrN;multi-layer

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[2] Dowson D, Coatings Tribology, Tribology series 28, p.7-31 ELSEVIER, Amsterdam, (1994).

[3] Prengel HG, Santhanam AT, Penich RM, Jindal PC, Wendt KH, Surf. Coat. Technol., 597, 94 (1997)

[4] Heck S, Emmerich T, Munder I, Steinebrunner J, Surf. Coat. Technol., 467, 86 (1996)

[5] Lee YT, Nonferrous Metal V Titanium, p.406-408, Korea Metal Journal News, Korea (2009).

[6] Leyens C, Peters M, Titanium and Titanium Alloys, p.423-465, WILEY-VCH Gmbh & Co. KGaA, Germany (2003).

[7] Hyun CY, Huh JK, Lee WH, Korean J. Mater. Res., 16, 173 (2005)

[8] Lampe T, Eisenberg S, Laudien G, Surf. Eng., 9, 69 (1993)

[9] Lee JY, Oh DJ, Kim HJ, Chung CH, J Korean Acad Prosthodont, 45, 675 (2007)

[10] Lee GS, Bae SH, Lee YZ, Korean Soc. Tribologists & Lubrication Eng., 26, 68 (2010)

[11] Carvalho S, Vaz F, Rebouta L, Schneider D, Cavaleiro A, Alves E, Surf. Coat. Technol., 142, 110 (2001)

[12] Sakaki M, Sakakibara T, IEEE Trans. Plasma Sci., 22, 1049 (1994)

[13] Navinsek B, Panjan P, Surf. Coat. Technol., 59, 244 (1993)

[14] Milosev I, Strehblow HH, Navinsek B, Surf. Coat. Technol., 74, 897 (1995)

[15] Navinsek B, Panjan P, Cvelbar A, Surf. Coat. Technol., 74, 155 (1995)

[16] Baik SY, Na EY, J. Korean Soc. Mar. Eng., 27, 447 (2003)

[17] Kwon SS, Shin CH, Shin GY, Oral. Biol. Res., 33, 36 (2009)

[18] Shew BY, Huang JL, Lii DF, Int. J. Thin Solid Films, 293, 212 (1997)

[19] Choi WS, Kim HS, Park BS, Lee KK, Lee DJ, Lee KM, Korean J. Mater. Res., 17(5), 256 (2007)

[20] Lee SY, Kim SH, J. Korean Inst. Surf. Eng., 44, 233 (2011)

[21] Oh KT, Sim HM, Hwang CJ, Kim KN, J. Korean Soc. Dent. Mater., 29, 221 (2002)

[22] Han JH, Lee KH, Shin MC, Anal. Sci. Technol., 9, 192 (1996)