Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1063-1066, 1995 DOI10.1116/1.579586 Export Citation Ionized Magnetron Sputter-Deposition of Amorphous-Carbon Nitride Thin-Films Li D, Lopez S, Chung YW, Wong MS, Sproul WD Keywords:STRUCTURAL-PROPERTIES;COMPRESSIBILITY Please enable JavaScript to view the comments powered by Disqus.
