Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1067-1072, 1995 DOI10.1116/1.579587 Export Citation Residual-Stress in Metal-Ion Implanted Titanium Nitride Films Studied by Glancing Incidence X-Ray-Diffraction Perry AJ, Treglio JR, Valvoda V, Rafaja D Keywords:GRAZING-INCIDENCE;TIN;ZRN;HFN;PROFILES;STATE Please enable JavaScript to view the comments powered by Disqus.
