Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1644-1648, 1995 DOI10.1116/1.579745 Export Citation Thermal-Behavior of Carbon Nitride and Tin/NbN Superlattice Films Lopez S, Wong MS, Sproul WD Keywords:COATINGS;DEPOSITION;SOLIDS Please enable JavaScript to view the comments powered by Disqus.
