Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3294-3299, 1994 DOI10.1116/1.587615 Export Citation 3-Dimensional Laser Direct Writing - Applications to Multichip Modules Nassuphis N, Mathews RH, Palmacci ST, Ehrlich DJ Please enable JavaScript to view the comments powered by Disqus.
