Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3959-3964, 1994 DOI10.1116/1.587410 Export Citation 50-nm X-Ray-Lithography Using Synchrotron-Radiation Chen Y, Kupka RK, Rousseaux F, Carcenac F, Decanini D, Ravet MF, Launois H Please enable JavaScript to view the comments powered by Disqus.
