Journal of Vacuum Science & Technology B, Vol.14, No.6, 3714-3718, 1996
Merit Functions for Lithographic Lens Design
We describe a new approach to the optimization of lithography lenses where lithographic quality factors are enclosed inside the optimization loop. These quality factors are derived from an image simulation program which calculates the relevant lithography metrics each time an optimization cycle is attempted. We find lithographic merit functions strongly impact the final lens performance, and superior lithographic imaging is possible when they are employed. We also show that lens users benefit by understanding the aberration balance inherent in each lithography lens.