화학공학소재연구정보센터
Materials Research Bulletin, Vol.36, No.5-6, 1065-1074, 2001
Dielectric thick films deposition by particle coating method
A highly stable, water based metal organic BaTiO3 sol yielding pure cubic perovskite structure was developed as a dispersant and binder for BaTiO3 powder coating. Dense, uniform and crack-free BaTiO3 thick films of 2-7 mum were prepared by using the BaTiO3 sol and 0.2 mum X7R based BaTiO3 powders. The film quality and thickness were investigated by optimizing process parameters such as solids concentration and heat treatment. The microstructure was examined by means of BFM. The inorganic BaTiO3 sol filled the gores among the BaTiO3 particles in addition to providing binding action for the BaTiO3 particles as well as promoting adhesion of the film to the substrate, The dielectric measurements demonstrate that the BaTiO3 thick films prepared by the sol-gel/powder coating process have good dielectric properties that are comparable with the data from conventional tape-cast BaTiO3 thin layers.