화학공학소재연구정보센터
Solid State Ionics, Vol.108, No.1-4, 85-90, 1998
Structure and expected piezoelectric properties of sol-gel derived multilayer PZT films
Multilayer duplex PZT films consisting of alternating porous and dense layers have been formed by a sol-gel repeated coating method with a heating rate of 100 degrees C min(-1). Structure and porosity of the films are examined by XRD, TEM and FT-IR. The porosity of the multilayer films fired at 600 degrees C is increased by heat treatment at 750 degrees C. The volume fraction of the pyrochlore phase decreases with increasing coating time. The relative dielectric constant of multilayer films with thickness 12 mu m ranges from 1100 (10 000 Hz) to 1400 (100 Hz). The piezoelectric voltage coefficient g(33), of the multilayer films is calculated to be enhanced by the introduction of layers with a high porosity.