Thin Solid Films, Vol.280, No.1-2, 204-210, 1996
Mechanical-Properties of A-C-H and A-C-H/SiOx Nanocomposite Thin-Films Prepared by Ion-Assisted Plasma-Enhanced Chemical-Vapor-Deposition
Keywords:AMORPHOUS-CARBON FILMS;DIAMOND-LIKE CARBON;TRIBOLOGICAL PROPERTIES;INTERFACE PROPERTIES;LOW-PRESSURE;ADHESION;LAYERS;SILICON;GROWTH;PHASES