화학공학소재연구정보센터
Thin Solid Films, Vol.312, No.1-2, 219-227, 1998
Mechanical stability of DLC films on metallic substrates - Part II - Interfacial toughness, debonding and blistering
DLC coatings have been deposited onto four metallic substrates, and also onto silicon, with the interfaces being prepared in various ways. Films with a range of thicknesses have been produced anti specimens have been subjected to changes in temperature. From a knowledge of the residual stress levels in these films as a function of temperature (see Part I), the strain energy release rate for interfacial debonding has been monitored during deposition and subsequent temperature changes. The value of the strain energy release rate at a point when interfacial debonding occurred has been taken as thr : interfacial toughness (fracture energy). It is concluded from these observations that the interfacial toughness is low for DLC films deposited onto mechanically-polished surfaces of titanium, mild steel ol stainless steel, but quite high on aluminium. Pre-cleaning by bombardment with energetic argon ions mises the interfacial toughness for the steels and for aluminium, but not for titanium. These observations have been related to the nature of the oxide films on these substrates. A thin sputtered interlayer of aluminium was found to raise the inter-facial toughness significantly for the steels and for titanium. However, experiments with silicon substrate specimens stowed that the good interfacial adhesion with Al interlayers is severely impaired by heating in vacuum to temperatures of the order of 500 degrees C. It has been established that this impairment of adhesion is a consequence of the release of Ar entrapped in the Al during sputter deposition, which promotes the formation of blisters and detachment of the film.