Ferroelectric properties and reliability characteristics of (111) and (100) preferred tetragonal Pb(Zr0.2Ti0.8)O-3 (PZT) thin film capacitors have been investigated as a function of top electrode thickness. The (111) preferred films exhibit better squareness of the hysteresis loop with larger remanant polarization and coercive field than the (100) preferred films. Top electrode thickness dependence of switching polarization can be explained by the compressive stress induced by the top electrode annealing. The film with thinner top electrode shows less initial switching polarization, however, better endurance characteristics due to enhancing partial switching region,