Yttria-doped zirconia and pure zirconia membranes were prepared with sol-gel method using zirconium oxychloride octahydrate (ZrOCl2. 8H(2)O) as starting material. Characterization for membranes was performed by means of BET, TG-DTA, SEM, XRD, FT-IR and Raman spectroscopy. Stable tetragonal phase and pore structure in yttria-doped zirconia membranes were observed at 400-700 degrees C. And, phase transformation temperature can be retarded to 300 degrees C. As a result, yttria doping can be developed as a method to secure the membrane from cracking in preparation process and high temperature applications.