Previous Article Next Article Table of Contents Thin Solid Films, Vol.340, No.1-2, 317-317, 1999 DOI10.1016/S0040-6090(99)00090-5 Export Citation Experimental and numerical analysis of rapid reaction to initiate the radical chain reactions in WSix CVD (vol 320, pg 151, 1998) Chae YK, Egashira Y, Shimogaki Y, Sugawara K, Komiyama H Please enable JavaScript to view the comments powered by Disqus.
