The effect of microstructure and interface conditions on the exchange coupling field H-ex and coercivity H-c of NiFe/FeMn systems was investigated. The results show that the exchange coupling was dependent on [111] crystal orientation and interface roughness as well as the grain size of FeMn. The high H-ex (approximate to 120 Oe) and low H-c (approximate to 5 Oe) of the pinned NiFe layer was achieved by a two-step deposition procedure. The down sublayers were deposited at a lower argon pressure, and the upper sublayers were deposited at a higher argon pressure. The former promoted the formation of the strong (111) textures and smooth interfaces. The latter promoted small domains and sharp interfaces.