Mass fabrication processes such as injection molding and hot embossing are highly suitable for the replication of micro- and nanostructures. They require thermoplastic polymers with good molding properties at moderate process temperatures. We show a quantitative approach to the analysis of the molding properties of polymers in the nanorange in which the parameters are most important for achieving good replication fidelity. With this information we were able to fabricate high precision calibration chips for scanning probe microscopes.