We present a detailed description of fixed polarizer, rotating-polarizer and fixed analyzer spectroscopic ellipsometer called PRPSE. This configuration is especially interesting in that it eliminates the residual polarization of the light source. For the first time, to our knowledge, the optimized calibration procedure of PRPSE and the systematic and statistical errors are reported. Three calibration steps are necessary to determine all azimuthal angles of the instrument. The reflection measurement from a sample 109 nin SiO2 on silicon substrate is used as an example for the calibration procedure. The main sources of errors in PRPSE are presented and discussed. The tracking method is used to minimize the random errors and new functions are found to position the analyzer. Experimental verification of error reductions and stability tests are also achieved. The average values of ellipsometric parameters are obtained with a standard deviation of approximately 10(-3) for tanPsi and cosDelta.