플라즈마 디스플레이 패널(PDP) 내부 표면 변화 관찰

소현; 이기형; 김영채; Hyun Soh; Ki Hyung Lee; Young Chai Kim

HWAHAK KONGHAK, Vol.40, No.5, 602-606, October, 2002

Export Citation

플라즈마 디스플레이 패널(PDP) 내부 표면 변화 관찰

Observation of Inner Surface Change in Plasma Display Panel (PDP)

소현, 이기형, 김영채 ^†

한양대학교 화학공학과, 서울 133-791

Hyun Soh, Ki Hyung Lee, and Young Chai Kim^†

Department of Chemical Engineering, Hanyang University, Seoul 133-791, Korea

E-mail:

초록

플라즈마 디스플레이 패널(PDP) 제조에서 에이징 공정은 표면 안정화를 위한 최종단계이다. 방전에 의한 에이징 효과를 이해하기 위해 7인치 크기의 패널 내부를 분석하기 위한 in-situ 시스템을 고안하여, 에이징 시간에 따른 패널을 진공상태에서 해체하고 분석시스템으로 이송한 후 ESCA(Electron Spectroscopy for Chemical Analysis)로 측정하였다. 전면판의 MgO 보호막은 초기 수분과 탄소 성분에 의한 Mg(OH)2, MgCO3의 화합물이 형성되어있어, 플라즈마 에이징 시간이 증가하면서 MgO형태로 화학적 변화하고 있다. 또한, 배면판의 형광체에 존재하는 탄소성분은 플라즈마에 의해 형성된 하전 입자의 스퍼터링에 의해 기기측정한계 이하까지 제거되었다. 전면판과 배면판의 변화는 12시간 이후 안정되었다. 이는 기존 최소 에이징 공정시간과 일치한다.

Aging process for the surface stabilization is the final step in plasma display panel(PDP) fabrication. We designed and installed a in-situ analysis system to investigate the change of interior surface of 7-inch test panel. PDP was disassembled in the system and transferred to the in-situ electron spectroscopy for chemical analysis(ESCA) chamber without exposure. MgO protection layer on the front panel indicated the presence of Mg(OH)2, MgCO3 compounds due to the hydration and carbon incorporation on the panel. These compounds were converted to the MgO with increasing time of the plasma aging. Carbon impurity in phosphor on the rear panel was reduced to the level lower than detection limits of ESCA by sputtering of the radicals in the plasma after 12 hours of aging. ESCA analysis revealed that 12 hours of aging time is consistent with the time to stabilize the change interior surface.

Keywords:Plasma Display Panel;Aging;ESCA;MgO and Phosphor

[References]

Koiwa I, Sawai H, IEEE Trans. Electron Devices, 41, 1523 (1994)
Mikoshiba S, J. Soc. Information Display, 10, 21 (1994)
Seo JH, Jeong JS, Lee JY, Whang KW, J. Appl. Phys., 88, 1257 (2000)
Kim KN, Kim JK, Whang KW, Lee SH, J. Korean Vacuum Soc., 8, 482 (1999)
Lee KJ, Jung YA, Row KH, HWAHAK KONGHAK, 39(6), 715 (2001)
Ardizzone S, Bianchi CL, Fadoni M, Vercelli B, Appl. Surf. Sci., 119, 253 (1997)
Sun DM, Sun ZQ, Li AX, Xu ZY, Vacuum, 52, 383 (1999)
Justel T, Krupa JC, Wiechert DU, J. Luminescence, 93, 179 (2001)
Park CH, Kim YK, Lee SH, Lee WG, Sung YM, Thin Solid Films, 366(1-2), 88 (2000)
Yao HB, Li Y, Wee ATS, Appl. Surf. Sci., 158, 112 (2000)
Okazaki C, Shiiki M, Suzuki T, Suzuki K, J. Luminescence, 89, 1280 (2000)
Park CH, Kim YK, Lee WG, Cho JS, Mater. Sci. Eng., B60, 149 (1999)
Lee JJ, Jang SH, Tae HS, Choi KC, J. Information Display, 2, 52 (2001)
Lio P, Kendelewicz T, Parks GA, Surf. Sci., 412, 287 (1998)
Jeong EH, Kim YK, Park HG, Park CH, J. Information Display, 2, 14 (2001)
Kim CH, Kwon IE, Park CH, Hwang YJ, Hong GY, J. Alloy. Compd., 311, 33 (2000)
Tannas LE, Glenn WE, Doane JW, "Flat-panel Display Technologies," Noyes Publication, New Jersey (1995)

[Referenced By]

[Related Articles]

[1] Koiwa I, Sawai H, IEEE Trans. Electron Devices, 41, 1523 (1994)

[2] Mikoshiba S, J. Soc. Information Display, 10, 21 (1994)

[3] Seo JH, Jeong JS, Lee JY, Whang KW, J. Appl. Phys., 88, 1257 (2000)

[4] Kim KN, Kim JK, Whang KW, Lee SH, J. Korean Vacuum Soc., 8, 482 (1999)

[5] Lee KJ, Jung YA, Row KH, HWAHAK KONGHAK, 39(6), 715 (2001)

[6] Ardizzone S, Bianchi CL, Fadoni M, Vercelli B, Appl. Surf. Sci., 119, 253 (1997)

[7] Sun DM, Sun ZQ, Li AX, Xu ZY, Vacuum, 52, 383 (1999)

[8] Justel T, Krupa JC, Wiechert DU, J. Luminescence, 93, 179 (2001)

[9] Park CH, Kim YK, Lee SH, Lee WG, Sung YM, Thin Solid Films, 366(1-2), 88 (2000)

[10] Yao HB, Li Y, Wee ATS, Appl. Surf. Sci., 158, 112 (2000)

[11] Okazaki C, Shiiki M, Suzuki T, Suzuki K, J. Luminescence, 89, 1280 (2000)

[12] Park CH, Kim YK, Lee WG, Cho JS, Mater. Sci. Eng., B60, 149 (1999)

[13] Lee JJ, Jang SH, Tae HS, Choi KC, J. Information Display, 2, 52 (2001)

[14] Lio P, Kendelewicz T, Parks GA, Surf. Sci., 412, 287 (1998)

[15] Jeong EH, Kim YK, Park HG, Park CH, J. Information Display, 2, 14 (2001)

[16] Kim CH, Kwon IE, Park CH, Hwang YJ, Hong GY, J. Alloy. Compd., 311, 33 (2000)

[17] Tannas LE, Glenn WE, Doane JW, "Flat-panel Display Technologies," Noyes Publication, New Jersey (1995)