프탈로시아닌 유기물 반도체를 이용한 NO<sub>2</sub> 가스 센서

정석봉; 전희권; 이덕동; 최동한; 지종기; 김재창

HWAHAK KONGHAK, Vol.37, No.5, 639-645, October, 1999

Export Citation

프탈로시아닌 유기물 반도체를 이용한 NO₂ 가스 센서

Phthalocyanine Organic Semiconductor for NO₂ Gas Sensor

정석봉, 전희권, 이덕동, 최동한, 지종기, 김재창

초록

여러 금속 프탈로시아닌을 이용한 NO₂ 가스 센서가 진공도 2*10^-5 torr, 증착온도 390^oC에서 진공 증착법에 의해서 제조되었다. 여러 금속 프탈로시아닌 중에서 PbPc박막이 5 ppm NO₂ 농도에서 80% 이상의 가장 좋은 감도를 나타냈으며, PbPc 박막 구조는 tri, mono-clinic이 혼합되어 있는 것으로 나타났다. 응답 및 회복 시간을 포함한 최적의 동작 조건과 NO₂ 가스의 연속적인 흡, 탈찰 특성이 파악되었고, 수분을 포하한 여러 가지 산화, 환원성 가스에 대한 선택성을 비교검토하였다.

NO₂ gas sensors using various metal phthalocyanines were prepared by vacuum sublimation method at 390^oC to test the electrical properties of the sensors in the presence of NO₂ gas. Among the sensors prepared in the present study, a lead phthalocyanine(PbPc) thin film showed the best performance and its sensitivity was over 80% at 5 ppm of NO₂ gas. The structure of PbPc thin film was a mixture of tri and mono-clinic crystal phases. Optimal operating conditions including response time, cyclic treatment of NO₂ gas, and selectivity of various reduction and oxidation gases were developed and examined.

Keywords:Lead Phthalocyanine;Tri and Mono-clinic;Sensitivity;Response Time

[References]

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Akiyama M, Tamaki J, Miura N, Yamazoe N, Chem. Lett., 1611 (1991)
Nakamura Y, Ishikawa S, Koyama R, Yamagina H, J. Ceram. Soc. Jpn., 102(3), 273 (1994)
Kudo S, Ohnishi H, Matsumoto T, Ippommatsu M, Sens. Actuators B-Chem., 23, 219 (1995)
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Capobianchi A, Paoletti AM, Pennesi G, Rossi G, Sens. Actuators B-Chem., 48, 333 (1998)
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Azim-Araghi ME, Krier A, Abass, Semicond. Sci. Technol., 12, 1625 (1997)
Kim SR, Choi SA, Kim JD, Choi KH, Park SK, Chang YH, Synth. Met., 71, 2293 (1995)
Seiyama T, Denki Kagaku, 40(3), 244 (1972)
Collins RA, Belghachi A, Mater. Lett., 8, 349 (1989)
Collins RA, Krier A, Abass AK, Thin Solid Films, 229, 113 (1993)
Campbell D, Collins RA, Phys. Stat. Sol., 152(a), 431 (1995)
Miyamoto A, Nichogi K, Taomoto A, Nambu T, Murakami M, Thin Solid Films, 256(1-2), 64 (1995)
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[1] Collins RA, Abass AK, Krier A, Thin Solid Films, 239(2), 268 (1994)

[2] Kanamori M, Okamoto Y, Ohya Y, Takahashi Y, J. Ceram. Soc. Jpn., 103(2), 113 (1995)

[3] Matsushima S, Kunitsugu S, Kobayashi K, Okada G, J. Ceram. Soc. Jpn., 103(3), 302 (1995)

[4] Lampe U, Gerblinger J, Meixner H, Sens. Actuators B-Chem., 26 (1995)

[5] Matsushima S, Ikeda D, Kobayashi K, Okada G, Sens. Actuators B-Chem., 13-14, 621 (1993)

[6] Akiyama M, Tamaki J, Miura N, Yamazoe N, Chem. Lett., 1611 (1991)

[7] Nakamura Y, Ishikawa S, Koyama R, Yamagina H, J. Ceram. Soc. Jpn., 102(3), 273 (1994)

[8] Kudo S, Ohnishi H, Matsumoto T, Ippommatsu M, Sens. Actuators B-Chem., 23, 219 (1995)

[9] Moriya K, Enomoto H, Nakamura Y, Sens. Actuators B-Chem., 13-14, 412 (1993)

[10] Miura N, Yao S, Shimizu Y, Yamazoe N, Sens. Actuators B-Chem., 13-14, 387 (1993)

[11] Capobianchi A, Paoletti AM, Pennesi G, Rossi G, Sens. Actuators B-Chem., 48, 333 (1998)

[12] Bott B, Jones TA, Sens. Actuators B-Chem., 5, 43 (1984)

[13] Gould RD, Coodination Chem. Rev., 156, 237 (1996)

[14] Azim-Araghi ME, Krier A, Abass, Semicond. Sci. Technol., 12, 1625 (1997)

[15] Kim SR, Choi SA, Kim JD, Choi KH, Park SK, Chang YH, Synth. Met., 71, 2293 (1995)

[16] Seiyama T, Denki Kagaku, 40(3), 244 (1972)

[17] Collins RA, Belghachi A, Mater. Lett., 8, 349 (1989)

[18] Collins RA, Krier A, Abass AK, Thin Solid Films, 229, 113 (1993)

[19] Campbell D, Collins RA, Phys. Stat. Sol., 152(a), 431 (1995)

[20] Miyamoto A, Nichogi K, Taomoto A, Nambu T, Murakami M, Thin Solid Films, 256(1-2), 64 (1995)

[21] Parr ATJ, Krier A, Collins RA, Thin Solid Films, 230, 225 (1993)

[22] Kanefusa S, Nitta M, Mater. Lett., 18, 349 (1989)