This article reports the synthesis of ZrN/W2N multilayered coatings with nanoscale bilayer period using rf magnetron sputtering. X-ray diffraction, Auger electron spectroscopy, scanning electron microscope, nanoindenter, and profiler were employed to investigate the influence of working pressure on microstructural and mechanical properties of the coatings. Well-defined composition modulation and layer structure of the multilayered coating are indicated directly. A mixed polycrystalline of ZrN(111), W2N(111), W2N(200) and W2N(311) textures appeared in the multilayered structures. All multilayered coatings revealed higher nanohardness, elastic modulus, critical load, and lower residual stress than the rule-of-mixture value of monolithic ZrN and W2N coatings, especially for one prepared at 0.8 Pa working pressure. (c) 2006 American Vacuum Society.