Semiconducting Ag2S thin films were deposited onto amorphous glass, and single crystalline wafer of Si (1 1 1) by using a new, simple and less expensive successive ionic layer adsorption and reaction (SILAR) chemical method. The XRD studies show that the crystallinity of Ag2S film depends on the type of substrate. The microstructural, optical and electrical properties of Ag2S films deposited onto glass substrate and subsequently annealed at various (373-573 K) temperatures in air were studied and results are reported.