Potassium lithium niobate K3Li2Nb5O15 (KLN) films have been deposited on SiO2/Si by sol-gel method using the ethoxides of K, Li, and Nb as starting materials. XRD and Raman studies have revealed that tetragonal tungsten-bronze-type structure could be achieved if the films were annealed at 700 degrees C. The film had smooth and crack-free surface. Optical guiding measurement indicated that the film has a refractive index of 2.1443 at 632.8 nm.